Vapor Polishing of Micromachined Structures
نویسندگان
چکیده
Micromachined polymer surfaces often lack smooth optical finish. Here we present a simple device for polishing these surfaces by stream of vapor of aggressive solvent. Depending on exposition, the initial roughness may be partially or completely removed, at the expense of slight smoothing of sharp angles within the modified area. Unlike the industrial techniques of vapor treatment of large area, our device may be used for selective smoothing of a selected part of the chip, increasing the range of potential applications. Materials suitable for processing include amorphous and partially crystalline thermoplastics, as polycarbonate, polysulfones, polyetherimide (PEI), COC, COP, ABS and PMMA.
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